Fees

Gloved hands working with wafer material on a tray

The Notre Dame Nanofabrication Facility (NDNF) is available for use by trained academic and commercial researchers. 2026 hourly rates for internal and external users are listed in the tables below. In addition, the University applies a facilities and administrative (indirect) cost as a percentage of direct costs at the rate effective at the time the direct costs are incurred.

All rates are subject to annual review and change.

NDNF users are billed monthly for their time on equipment through iLab, the same system used for scheduling.

Fiscal Year 2025-2026 (7/1/25-6/30/26)
NDNF Rates: Notre Dame Users

Item Fee
Cleanroom Access Fee $33/hour, plus applicable supplies and surcharges
Supplies and precious metals Current rates listed in iLab when scheduling.
Self-Use Surcharges  
Self-use of Scanning Electron Microscope (SEM) $58/hour
Self-use of Heidelberg MLA-150 $27/hour
Self-use of Electron Beam Lithography (EBL) $113/hour
Staff-Operated Processing Surcharges  
Staff-operated processing on all equipment, except EBL $113/hour
Staff-operated processing on EBL $153/hour

NDNF Rates: External Users

Item Fee
Cleanroom Access Fee $124/hour, plus applicable supplies and surcharges
Supplies and precious metals Current rates listed in iLab when scheduling.
Equipment Surcharges  
Scanning Electron Microscope (SEM) $190/hour
Heidelberg MLA-150 $46/hour
Staff-Operated Processing Surcharges  
Staff-operated processing on all equipment, except Electron Beam Lithography (EBL) $125/hour
Staff-operated processing on EBL $350/hour

Annual Fiscal Year Increases (7/1/2026)

Due to anticipated adjustments for staffing and expenses, proposers should anticipate ~15% annual increases for FY26-27.