Fees

The Notre Dame Nanofabrication Facility (NDNF) is available for use by trained academic and commercial researchers. 2026 hourly rates for internal and external users are listed in the tables below. In addition, the University applies a facilities and administrative (indirect) cost as a percentage of direct costs at the rate effective at the time the direct costs are incurred.
All rates are subject to annual review and change.
NDNF users are billed monthly for their time on equipment through iLab, the same system used for scheduling.
Fiscal Year 2025-2026 (7/1/25-6/30/26)
NDNF Rates: Notre Dame Users
| Item | Fee |
|---|---|
| Cleanroom Access Fee | $33/hour, plus applicable supplies and surcharges |
| Supplies and precious metals | Current rates listed in iLab when scheduling. |
| Self-Use Surcharges | |
| Self-use of Scanning Electron Microscope (SEM) | $58/hour |
| Self-use of Heidelberg MLA-150 | $27/hour |
| Self-use of Electron Beam Lithography (EBL) | $113/hour |
| Staff-Operated Processing Surcharges | |
| Staff-operated processing on all equipment, except EBL | $113/hour |
| Staff-operated processing on EBL | $153/hour |
NDNF Rates: External Users
| Item | Fee |
|---|---|
| Cleanroom Access Fee | $124/hour, plus applicable supplies and surcharges |
| Supplies and precious metals | Current rates listed in iLab when scheduling. |
| Equipment Surcharges | |
| Scanning Electron Microscope (SEM) | $190/hour |
| Heidelberg MLA-150 | $46/hour |
| Staff-Operated Processing Surcharges | |
| Staff-operated processing on all equipment, except Electron Beam Lithography (EBL) | $125/hour |
| Staff-operated processing on EBL | $350/hour |
Annual Fiscal Year Increases (7/1/2026)
Due to anticipated adjustments for staffing and expenses, proposers should anticipate ~15% annual increases for FY26-27.