Nano- and Micro-Scale Fabrication Cleanroom
Exploring tomorrow's innovations today
The Notre Dame Nanofabrication Facility (NDNF) is a world-class teaching and research cleanroom located in Stinson-Remick Hall of Engineering at the University of Notre Dame. The NDNF provides a comprehensive suite of state-of-the-art equipment for designing and manufacturing integrated circuits and devices with geometries ranging from centimeters down to a few nanometers. NDNF users include undergraduate and graduate students, postdoctoral researchers, and faculty from many departments within the University; researchers from other universities around the world; and customers from several industries.
NDNF users explore a wide range of materials and processes, including silicon-related electronic devices, compound semiconductors, nanowires, carbon nanotubes, graphene, and organic polymer-based materials. In addition, the NDNF facilitates the study of microfluidic technologies for medical applications and micron-scale mechanical device fabrication.
The NDNF makes possible a wide range of cutting-edge research in fields that include high performance electronic devices, optical electronic processes, microelectromechanical systems, nanomagnetics, microfluidics, and bioengineering.
The NDNF Laboratory Operations & Safety Procedures Manual provides the basic safety rules and guidelines, as well as the required operational protocols to ensure that work performed in the cleanroom is as safe and productive as possible. Learn more about the safety training and orientation required for all users.
Cleanroom users have access to more than 60 sophisticated tools arranged throughout the facility's Class 10,000, Class 1000, and Class 100 spaces. The equipment provides capabilities for lithography, deposition, etching, thermal oxidations, anneals, and other thermal treatments, planarization, and mechanical processing, as well as characterization. Search the Equipment Database to zero in on the right tool to accomplish your research goals and the safe operation of each.
Your safety in the laboratory is determined not only by your actions but also by the actions of those around you. If you observe someone else in the lab working in an unsafe or inappropriate manner, it is your responsibility to first bring it to his or her attention, and then if necessary, bring it to the attention of the laboratory manager or laboratory director.