FC1800-3 Evaporator
Manufacturer: Airco Temescal
The Model FC-1800 is an electron beam vacuum deposition system. It has a four-pocket crucible system for deposition of multiple films without the need to open the chamber. Also installed in the evaporator is a wafer chuck that can be cooled down to 77K (LN2) temperatures for special processing.
Film types available on this tool are: Ag, Al, AlSi(98:2), Cr, Cu, Ge, Mo, Ni, Sc, Si, Sn, Ta, Ti, W, Permalloy, and Supermalloy.