Veeco Four-Point Probe
Manufacturer: Veeco
The FPP 5000 is a four-point probe used for the measurement of resistive properties of semiconductor wafer and resistive films. Its microprocessor based electronics permits direct computation of V/I, sheet or slice resistivity, metallization thickness and P-N type testing. The electronics and probing mechanism are contained in a single compact package. The rugged cast aluminum housing assures mechanical integrity of the probe mechanism. The probing mechanism features a constant force probe head, which is rigidly fixed in the housing.
Operating Instructions
Prohibited Materials
Anything that could contaminate the probe tips should be avoided (greases, oils, soft resists, etc)