Tegal Barrel Asher
Manufacturer: Tegal
The Tegal PlasmaLine asher is a general purpose O2 plasma used to remove photoresist and for general purpose cleaning. It incorporates RF as the plasma source and is typically used at 300-400 mT. It has a high selectivity to resist and an overall low removal rate and is typically used for descum processes.
Operating Instructions
Allowed Materials
Si, Ge, C, GaAs and its compounds, InP and its compounds, cleaned SiO2 (glass), and cleaned Al2O3 (sapphire)
Prohibited Materials
High vapor pressure metals including: indium, lead, tin, and zinc
Magnetic materials including: iron, nickel, and cobalt