SSI RTP System
Manufacturer: SSI
The Solaris 75/100 is an RTP system designed for R&D and pre-production. The Solaris 100 can process up to 4" substrates up to 1250 °C. Utilizing 13 quartz halogen lamps, high-purity quartz wafer holder and chamber, and the oven contains gold reflectors for fast heating rates and long lamp lifetimes. The advanced temperature measurement technique and signal conditioners allow the PID controller to maintain stable and repeatable temperatures through a wide process application base.
System gases: N2 , O2 and Forming Gas (10% H2 in argon)