Semiconductor Parameter Analyzer
Manufacturer: Agilent
The M150 Measurement Platform is a high-performance probing station that allows for precision electrical measurements, from DC to high-frequency RF. The system can accommodate up to 150 mm wafers (or smaller samples), which are held in place by a vacuum chuck. The optical microscope allows for precise placement of the four manipulator test probes. The manipulators remain fixed while the wafer moves for multiple device testing on a die-by-die level. Manipulators are held in place by vacuum and additionally have three-axis movement to allow for fine probe placement. Probe cards may also be used in place of the free moving manipulators if they are created.
Available to use with the Probe Station is an Agilent B1500A Semiconductor Device Analyzer (SDA), it is a complete solution for characterization of various devices. It supports various measurement capabilities for IV, CV, pulsed IV and fast IV measurement and enables a wide range of electrical characterizations and evaluations for device (FETs, inverters, ring oscillators, etc.), material, semiconductor, active/passive component, and any electric devices. Embedded Windows and powerful EasyEXPERT software support efficient and restorable device characterization on the general user interface (GUI) basis operation. The operation is available through the 15-inch wide touch screen in addition to keyboard and mouse operation for ease of use. The EasyEXPERT software also provides an efficient test environment for intuitive operation, analysis, and exploration in device characterization.