Savannah ALD
Manufacturer: Cambridge Nanotech
The Savannah 100 is an atomic layer deposition (ALD) tool. ALD is a technique that allows growth of thin films, atomic layer by layer. The ALD can create conformal coatings of metals, oxides, and nitrides of all substrates. This tool can handle small pieces up to 4" wafers.
Precursors: TMAl, TDMAHf
Film types available: Al2O3 and HfO2
Gases: H2O and O3