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Plassys Sputtering System

Plassys Quantum Computing

Manufacturer: PLASSYS MEB550S4

The PLASSYS MEB550S4 is a high-purity superconducting film deposition system. The e-beam evaporation sub-system supports aluminium Josephson junction double-angle shadow evaporation and in-situ ion milling. The magnetron co-sputtering system currently hosts two targets, Nb and Ti.