FC1800-1 Evaporator
Manufacturer: Airco Temescal
The Model FC-1800 is an electron beam vacuum deposition system. It has a six-pocket crucible system for deposition of multiple films without the need to open the chamber.
Film types available on the FC-1800 #1 are: Al, AlBSi(98:1:1), AlSi(98:2), AlB, Au, AuGe(88:12), Al2O3, Co, Cr, Ge, Hf, Mo, MoO3, Ni, NiCr(80:20) Pd, Pt, PtIr, Si, Si (P-Doped), SiO2, Ta, Ti, TiO2, V, and W.