Dektak Profilometer
Manufacturer: Bruker
The DektakXT® stylus profilometer features a revolutionary benchtop design that enables critical nanometer-level surface measurements with an unmatched repeatability of 4 Å and up to 40% improvement in scanning speeds. The Bruker’s Vision64 software complements DektakXT’s innovative design by providing the most intuitive and streamlined visual user interface. The combination of intelligent architecture and customizable automation capabilities allow for fast and comprehensive data collection and analysis. Whether you’re using a recipe to perform routine analysis on single scans, or applying custom filters settings and calculations, DektakXT’s Data Analyzer displays current data while also revealing other possible analyses.
Key parameters:
- Scan length: ±50.8 mm (2 inches) of X-Y translation
- Stage can accommodate small pieces up to 6” wafer size.
- Stylus Type (Fixed – 2 μm)
- Stylus Force: 1 - 15 mg (2-5 mg recommended)
- Profile type: Hill/Valley/Hill and Valley
- Range: should be larger than your stair height