Confocal Microscope
Manufacturer: Olympus
The Olympus LEXT OLS4000 is a confocal laser (405 nm) microscope capable of taking high-resolution 3D images. The magnification (optical and digital) of this microscope ranges from 108x – 17,280x. It is capable of resolving features 10 nm in size in the z direction (sample height) and 120 nm in the x-y plane; and measuring samples up to 10 mm thick and 100 mm wide. Stitching of an array of images can be used to capture large areas. The system is capable of performing a variety of metrology measurements. Step height, surface/line roughness, and area/volume measurements are some of the more commonly used metrology measurements.