BlueM Furnace

BlueM Furnace

Manufacturer: Lindberg-BlueM

This horizontal tube furnace is capable of operating up to 1000 °C. It is typically used for metal annealing to produce ohmic contacts and curing (spin on glass and BCB resists).

Gas sources: O2, N2, Ar, forming gas (10% H2 in argon)

Operating Instructions

Operating Instructions