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Annealsys AS-One 150

Annealsys RTP

Manufacturer: Annealsys AS-One 150

The AnnealSys AS-One system is a high temperature (1300 °C) system used for annealing, oxidation, nitridation, diffusion and other high temp applications.   It uses cold wall chamber technology for high process reproducibility due to high cooling rates.  The system is equiped with a high temperature pyrometer, turbomolecular pumping unit and process manometer for pressure control.

 

Gases available:  5